Shea, H. Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII. SPIE Digital Library.
Tohutoru Kātū Chicago (17th ed.)Shea, Herbert. Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII. SPIE Digital Library.
Tohutoro MLA (9th ed.)Shea, Herbert. Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII. SPIE Digital Library.
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