APA ציטוט

Wood, O. Extreme Ultraviolet (EUV) Lithography V. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Wood, Obert. Extreme Ultraviolet (EUV) Lithography V. SPIE Digital Library.

ציטוט MLA

Wood, Obert. Extreme Ultraviolet (EUV) Lithography V. SPIE Digital Library.