APA (7th ed.) Citation

Cain, J. Metrology, Inspection, and Process Control for Microlithography XXVIII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Cain, Jason. Metrology, Inspection, and Process Control for Microlithography XXVIII. SPIE Digital Library.

MLA (9th ed.) Citation

Cain, Jason. Metrology, Inspection, and Process Control for Microlithography XXVIII. SPIE Digital Library.

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