Cita APA

Cain, J. Metrology, Inspection, and Process Control for Microlithography XXVIII. SPIE Digital Library.

Citación estilo Chicago

Cain, Jason. Metrology, Inspection, and Process Control for Microlithography XXVIII. SPIE Digital Library.

Cita MLA

Cain, Jason. Metrology, Inspection, and Process Control for Microlithography XXVIII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.