APA (7. basım) Alıntı

Cain, J. Metrology, Inspection, and Process Control for Microlithography XXVIII. SPIE Digital Library.

Chicago Style (17. basım) Atıf

Cain, Jason. Metrology, Inspection, and Process Control for Microlithography XXVIII. SPIE Digital Library.

MLA (9th ed.) Atıf

Cain, Jason. Metrology, Inspection, and Process Control for Microlithography XXVIII. SPIE Digital Library.

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