Metrology, Inspection, and Process Control for Microlithography XXVIII
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| Format: | Elektronisch E-Book |
| Sprache: | Englisch |
| Veröffentlicht: |
SPIE Digital Library,
5/5/14
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| Schlagworte: | |
| Online-Zugang: | Full text available on Research4Life (SPIE Digital Library) |
| Beschreibung: | <strong>On-Campus Access Only (IP based access)</strong> |
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| Beschreibung: | 1 online resource |
| Format: | Mode of access: Internet |
| ISBN: | 9780819499738 |
| Zugangseinschränkungen: | Electronic access restricted to authorized AUW faculty, staff and students |