Lai, K. Optical Microlithography XXVII. SPIE Digital Library.
Citación estilo ChicagoLai, Kafai. Optical Microlithography XXVII. SPIE Digital Library.
Cita MLALai, Kafai. Optical Microlithography XXVII. SPIE Digital Library.
Warning: These citations may not always be 100% accurate.