Oehrlein, G. Advanced Etch Technology for Nanopatterning III. SPIE Digital Library.
Chicagoスタイル(17版)引用形式Oehrlein, Gottlieb. Advanced Etch Technology for Nanopatterning III. SPIE Digital Library.
MLA(9版)引用形式Oehrlein, Gottlieb. Advanced Etch Technology for Nanopatterning III. SPIE Digital Library.
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