Oehrlein, G. Advanced Etch Technology for Nanopatterning III. SPIE Digital Library.
Tohutoru Kātū Chicago (17th ed.)Oehrlein, Gottlieb. Advanced Etch Technology for Nanopatterning III. SPIE Digital Library.
Tohutoro MLA (9th ed.)Oehrlein, Gottlieb. Advanced Etch Technology for Nanopatterning III. SPIE Digital Library.
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