APA (7th ed.) Citation

Giffin, J. Developments in Semiconductor Microlithography. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Giffin, James. Developments in Semiconductor Microlithography. SPIE Digital Library.

MLA (9th ed.) Citation

Giffin, James. Developments in Semiconductor Microlithography. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.