Ciarlo, D. Developments in Semiconductor Microlithography III. SPIE Digital Library.
Cita Chicago (17th ed.)Ciarlo, Dino. Developments in Semiconductor Microlithography III. SPIE Digital Library.
Cita MLA (9th ed.)Ciarlo, Dino. Developments in Semiconductor Microlithography III. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.