APA (7th ed.) Zitazioa

Ciarlo, D. Developments in Semiconductor Microlithography III. SPIE Digital Library.

Chicago Style (17th ed.) Zitazioa

Ciarlo, Dino. Developments in Semiconductor Microlithography III. SPIE Digital Library.

MLA (9th ed.) Zitazioa

Ciarlo, Dino. Developments in Semiconductor Microlithography III. SPIE Digital Library.

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