Cita APA (7a ed.)

Starikov, A. Metrology, Inspection, and Process Control for Microlithography XXVII. SPIE Digital Library.

Cita Chicago Style (17a ed.)

Starikov, Alexander. Metrology, Inspection, and Process Control for Microlithography XXVII. SPIE Digital Library.

Cita MLA (9a ed.)

Starikov, Alexander. Metrology, Inspection, and Process Control for Microlithography XXVII. SPIE Digital Library.

Precaución: Estas citas no son 100% exactas.