Cita APA

Starikov, A. Metrology, Inspection, and Process Control for Microlithography XXVII. SPIE Digital Library.

Citación estilo Chicago

Starikov, Alexander. Metrology, Inspection, and Process Control for Microlithography XXVII. SPIE Digital Library.

Cita MLA

Starikov, Alexander. Metrology, Inspection, and Process Control for Microlithography XXVII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.