APA ציטוט

Starikov, A. Metrology, Inspection, and Process Control for Microlithography XXVII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Starikov, Alexander. Metrology, Inspection, and Process Control for Microlithography XXVII. SPIE Digital Library.

ציטוט MLA

Starikov, Alexander. Metrology, Inspection, and Process Control for Microlithography XXVII. SPIE Digital Library.