APA (7e ed.) Bronvermelding

Starikov, A. Metrology, Inspection, and Process Control for Microlithography XXVII. SPIE Digital Library.

Chicago (17e ed.) Bronvermelding

Starikov, Alexander. Metrology, Inspection, and Process Control for Microlithography XXVII. SPIE Digital Library.

MLA (9e ed.) Bronvermelding

Starikov, Alexander. Metrology, Inspection, and Process Control for Microlithography XXVII. SPIE Digital Library.

Let op: Deze citaties zijn niet altijd 100% accuraat.