Somervell, M. Advances in Resist Materials and Processing Technology XXX. SPIE Digital Library.
Chicago Style (17. basım) AtıfSomervell, Mark. Advances in Resist Materials and Processing Technology XXX. SPIE Digital Library.
MLA (9th ed.) AtıfSomervell, Mark. Advances in Resist Materials and Processing Technology XXX. SPIE Digital Library.
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