Somervell, M. Advances in Resist Materials and Processing Technology XXX. SPIE Digital Library.
Chicago (17e ed.) BronvermeldingSomervell, Mark. Advances in Resist Materials and Processing Technology XXX. SPIE Digital Library.
MLA (9e ed.) BronvermeldingSomervell, Mark. Advances in Resist Materials and Processing Technology XXX. SPIE Digital Library.
Let op: Deze citaties zijn niet altijd 100% accuraat.