Zhang, Y. Advanced Etch Technology for Nanopatterning II. SPIE Digital Library.
Chicago Style (17th ed.) CitationZhang, Ying. Advanced Etch Technology for Nanopatterning II. SPIE Digital Library.
MLA (9th ed.) CitationZhang, Ying. Advanced Etch Technology for Nanopatterning II. SPIE Digital Library.
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