Cita APA (7th ed.)

Kato, K. Photomask and Next-Generation Lithography Mask Technology XX. SPIE Digital Library.

Cita Chicago (17th ed.)

Kato, Kokoro. Photomask and Next-Generation Lithography Mask Technology XX. SPIE Digital Library.

Cita MLA (9th ed.)

Kato, Kokoro. Photomask and Next-Generation Lithography Mask Technology XX. SPIE Digital Library.

Atenció: Aquestes cites poden no estar 100% correctes.