Kato, K. Photomask and Next-Generation Lithography Mask Technology XX. SPIE Digital Library.
Cita Chicago (17th ed.)Kato, Kokoro. Photomask and Next-Generation Lithography Mask Technology XX. SPIE Digital Library.
Cita MLA (9th ed.)Kato, Kokoro. Photomask and Next-Generation Lithography Mask Technology XX. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.