APA (7th ed.) Citation

Kato, K. Photomask and Next-Generation Lithography Mask Technology XX. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Kato, Kokoro. Photomask and Next-Generation Lithography Mask Technology XX. SPIE Digital Library.

MLA (9th ed.) Citation

Kato, Kokoro. Photomask and Next-Generation Lithography Mask Technology XX. SPIE Digital Library.

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