APA (7th ed.) Citation

Schmid, U. Smart Sensors, Actuators, and MEMS VI. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Schmid, Ulrich. Smart Sensors, Actuators, and MEMS VI. SPIE Digital Library.

MLA (9th ed.) Citation

Schmid, Ulrich. Smart Sensors, Actuators, and MEMS VI. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.