MEMS and MOEMS Technology and Applications

MEMS, MOEMS, and Micromachining

MEMS/MOEMS Components and Their Applications IV

MEMS/MOEMS Components and Their Applications II

MEMS/MOEMS Components and Their Applications III

MEMS, MOEMS, and Micromachining II

MEMS, MOEMS, and Micromachining III

Design, Test, and Microfabrication of MEMS and MOEMS

Reliability, Testing, and Characterization of MEMS/MOEMS

ICO20: MEMS, MOEMS, and NEMS

Journal of Micro/Nanolithography, MEMS, and MOEMS

Design, Test, Integration, and Packaging of MEMS/MOEMS

Reliability, Testing, and Characterization of MEMS/MOEMS III

Reliability, Testing, and Characterization of MEMS/MOEMS II

Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019

Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020

Design, Test, Integration, and Packaging of MEMS/MOEMS 2001

Design, Test, Integration, and Packaging of MEMS/MOEMS 2002

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI

Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII

Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII

MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly

MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface

Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication
por: Rai-Choudhury, Prosenjit

Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography
por: Rai-Choudhury, Prosenjit

MEMS Reliability for Critical Applications

MOEMS and Miniaturized Systems

Micro-Optics and MOEMS

MEMS Reliability for Critical and Space Applications

Micro (MEMS) and Nanotechnologies for Space Applications