Hosono, K. Photomask and Next-Generation Lithography Mask Technology XVII. SPIE Digital Library.
Style de citation Chicago (17e éd.)Hosono, Kunihiro. Photomask and Next-Generation Lithography Mask Technology XVII. SPIE Digital Library.
Style de citation MLA (9e éd.)Hosono, Kunihiro. Photomask and Next-Generation Lithography Mask Technology XVII. SPIE Digital Library.
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