APA (7th ed.) Citation

Schenk, H. MOEMS and Miniaturized Systems X. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Schenk, Harald. MOEMS and Miniaturized Systems X. SPIE Digital Library.

MLA (9th ed.) Citation

Schenk, Harald. MOEMS and Miniaturized Systems X. SPIE Digital Library.

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