La Fontaine, B. Extreme Ultraviolet (EUV) Lithography II. SPIE Digital Library.
Chicago Style (17th ed.) CitationLa Fontaine, Bruno. Extreme Ultraviolet (EUV) Lithography II. SPIE Digital Library.
MLA (9th ed.) CitationLa Fontaine, Bruno. Extreme Ultraviolet (EUV) Lithography II. SPIE Digital Library.
Warning: These citations may not always be 100% accurate.