APA (7th ed.) Citation

Raymond, C. Metrology, Inspection, and Process Control for Microlithography XXV. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Raymond, Christopher. Metrology, Inspection, and Process Control for Microlithography XXV. SPIE Digital Library.

MLA (9th ed.) Citation

Raymond, Christopher. Metrology, Inspection, and Process Control for Microlithography XXV. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.