APA (7th ed.) Zitazioa

Raymond, C. Metrology, Inspection, and Process Control for Microlithography XXV. SPIE Digital Library.

Chicago Style (17th ed.) Zitazioa

Raymond, Christopher. Metrology, Inspection, and Process Control for Microlithography XXV. SPIE Digital Library.

MLA (9th ed.) Zitazioa

Raymond, Christopher. Metrology, Inspection, and Process Control for Microlithography XXV. SPIE Digital Library.

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