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AUWConferenceProceedingsResearch4Life(SPIE)007773 |
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260223c9999 xx r poo 0 0eng d |
| 020 |
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|a 9780819487155
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| 040 |
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|a BDCtgAUW
|c BDCtgAUW
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| 245 |
0 |
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|h [electronic resource]
|a Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V
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| 260 |
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1 |
|b SPIE Digital Library,
|c 9/19/11
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| 300 |
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|a 1 online resource
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| 500 |
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|a <strong>On-Campus Access Only (IP based access)</strong>
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| 506 |
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|a Electronic access restricted to authorized AUW faculty, staff and students
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| 538 |
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|a Mode of access: Internet
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| 655 |
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7 |
|a Conference papers and proceedings.
|2 Library of Congress
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| 700 |
1 |
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|a Postek, Michael
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| 856 |
4 |
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|z Full text available on Research4Life (SPIE Digital Library)
|u https://login.research4life.org/tacsgr1www_spiedigitallibrary_org/conference-proceedings-of-spie/8105
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