APA (7th ed.) Citation

Naulleau, P. Extreme Ultraviolet (EUV) Lithography III. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Naulleau, Patrick. Extreme Ultraviolet (EUV) Lithography III. SPIE Digital Library.

MLA (9th ed.) Citation

Naulleau, Patrick. Extreme Ultraviolet (EUV) Lithography III. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.