APA (7th ed.) Citation

Starikov, A. Metrology, Inspection, and Process Control for Microlithography XXVI. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Starikov, Alexander. Metrology, Inspection, and Process Control for Microlithography XXVI. SPIE Digital Library.

MLA (9th ed.) Citation

Starikov, Alexander. Metrology, Inspection, and Process Control for Microlithography XXVI. SPIE Digital Library.

Advarsel: Disse citationer er muligvist ikke 100% nøjagtige.