APA (7th ed.) Zitazioa

Starikov, A. Metrology, Inspection, and Process Control for Microlithography XXVI. SPIE Digital Library.

Chicago Style (17th ed.) Zitazioa

Starikov, Alexander. Metrology, Inspection, and Process Control for Microlithography XXVI. SPIE Digital Library.

MLA (9th ed.) Zitazioa

Starikov, Alexander. Metrology, Inspection, and Process Control for Microlithography XXVI. SPIE Digital Library.

Kontuz: berrikusi erreferentzia hauek erabili aurretik.