Cita APA

Starikov, A. Metrology, Inspection, and Process Control for Microlithography XXVI. SPIE Digital Library.

Citación estilo Chicago

Starikov, Alexander. Metrology, Inspection, and Process Control for Microlithography XXVI. SPIE Digital Library.

Cita MLA

Starikov, Alexander. Metrology, Inspection, and Process Control for Microlithography XXVI. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.