APA citiranje

Starikov, A. Metrology, Inspection, and Process Control for Microlithography XXVI. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Starikov, Alexander. Metrology, Inspection, and Process Control for Microlithography XXVI. SPIE Digital Library.

MLA citiranje

Starikov, Alexander. Metrology, Inspection, and Process Control for Microlithography XXVI. SPIE Digital Library.

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