Zhang, Y. Advanced Etch Technology for Nanopatterning. SPIE Digital Library.
Citación estilo ChicagoZhang, Ying. Advanced Etch Technology for Nanopatterning. SPIE Digital Library.
Cita MLAZhang, Ying. Advanced Etch Technology for Nanopatterning. SPIE Digital Library.
Warning: These citations may not always be 100% accurate.