Cita APA (7a ed.)

Behringer, U. 28th European Mask and Lithography Conference. SPIE Digital Library.

Cita Chicago Style (17a ed.)

Behringer, Uwe. 28th European Mask and Lithography Conference. SPIE Digital Library.

Cita MLA (9a ed.)

Behringer, Uwe. 28th European Mask and Lithography Conference. SPIE Digital Library.

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