Behringer, U. 28th European Mask and Lithography Conference. SPIE Digital Library.
Chicago (17e ed.) BronvermeldingBehringer, Uwe. 28th European Mask and Lithography Conference. SPIE Digital Library.
MLA (9e ed.) BronvermeldingBehringer, Uwe. 28th European Mask and Lithography Conference. SPIE Digital Library.
Let op: Deze citaties zijn niet altijd 100% accuraat.