Behringer, U. 28th European Mask and Lithography Conference. SPIE Digital Library.
Chicago Style (17. basım) AtıfBehringer, Uwe. 28th European Mask and Lithography Conference. SPIE Digital Library.
MLA (9th ed.) AtıfBehringer, Uwe. 28th European Mask and Lithography Conference. SPIE Digital Library.
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