Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays

Bibliografski detalji
Daljnji autori: Stover, John
Format: Elektronički e-knjiga
Jezik:engleski
Izdano: SPIE Digital Library, 11/4/96
Teme:
Online pristup:Full text available on Research4Life (SPIE Digital Library)
Opis
Opis predmeta:<strong>On-Campus Access Only (IP based access)</strong>
Opis fizičkog objekta:1 online resource
Format:Mode of access: Internet
ISBN:9780819422507
Pristup:Electronic access restricted to authorized AUW faculty, staff and students