Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays

Manylion Llyfryddiaeth
Awduron Eraill: Stover, John
Fformat: Electronig eLyfr
Iaith:Saesneg
Cyhoeddwyd: SPIE Digital Library, 11/4/96
Pynciau:
Mynediad Ar-lein:Full text available on Research4Life (SPIE Digital Library)

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