Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays

Bibliografiske detaljer
Andre forfattere: Stover, John
Format: Electronisk eBog
Sprog:engelsk
Udgivet: SPIE Digital Library, 11/4/96
Fag:
Online adgang:Full text available on Research4Life (SPIE Digital Library)

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