APA (7th ed.) Citation

DeBusk, D. Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III. SPIE Digital Library.

Chicago Style (17th ed.) Citation

DeBusk, Damon. Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III. SPIE Digital Library.

MLA (9th ed.) Citation

DeBusk, Damon. Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.