Rai-Choudhury, P. Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication. SPIE Digital Library.
Citazione stile Chigago Style (17a edizione)Rai-Choudhury, Prosenjit. Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication. SPIE Digital Library.
Citatione MLA (9a ed.)Rai-Choudhury, Prosenjit. Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication. SPIE Digital Library.
Attenzione: Queste citazioni potrebbero non essere precise al 100%.