Rai-Choudhury, P. Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication. SPIE Digital Library.
Tohutoru Kātū Chicago (17th ed.)Rai-Choudhury, Prosenjit. Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication. SPIE Digital Library.
Tohutoro MLA (9th ed.)Rai-Choudhury, Prosenjit. Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication. SPIE Digital Library.
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