APA (7th ed.) Citation

Jones, S. Metrology, Inspection, and Process Control for Microlithography XI. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Jones, Susan. Metrology, Inspection, and Process Control for Microlithography XI. SPIE Digital Library.

MLA (9th ed.) Citation

Jones, Susan. Metrology, Inspection, and Process Control for Microlithography XI. SPIE Digital Library.

Advarsel: Disse citationer er muligvist ikke 100% nøjagtige.