Jones, S. Metrology, Inspection, and Process Control for Microlithography XI. SPIE Digital Library.
शिकागो शैली (17वां संस्करण) प्रशस्ति पत्रJones, Susan. Metrology, Inspection, and Process Control for Microlithography XI. SPIE Digital Library.
एमएलए (9वां संस्करण) प्रशस्ति पत्रJones, Susan. Metrology, Inspection, and Process Control for Microlithography XI. SPIE Digital Library.
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