Jones, S. Metrology, Inspection, and Process Control for Microlithography XI. SPIE Digital Library.
Chicago (17e ed.) BronvermeldingJones, Susan. Metrology, Inspection, and Process Control for Microlithography XI. SPIE Digital Library.
MLA (9e ed.) BronvermeldingJones, Susan. Metrology, Inspection, and Process Control for Microlithography XI. SPIE Digital Library.
Let op: Deze citaties zijn niet altijd 100% accuraat.