Jones, S. Metrology, Inspection, and Process Control for Microlithography XI. SPIE Digital Library.
Chicago-referens (17:e uppl.)Jones, Susan. Metrology, Inspection, and Process Control for Microlithography XI. SPIE Digital Library.
MLA-referens (9:e uppl.)Jones, Susan. Metrology, Inspection, and Process Control for Microlithography XI. SPIE Digital Library.
Varning: dessa hänvisningar är inte alltid fullständigt riktiga.