Jones, S. Metrology, Inspection, and Process Control for Microlithography XI. SPIE Digital Library.
Chicago Style (17. basım) AtıfJones, Susan. Metrology, Inspection, and Process Control for Microlithography XI. SPIE Digital Library.
MLA (9th ed.) AtıfJones, Susan. Metrology, Inspection, and Process Control for Microlithography XI. SPIE Digital Library.
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