APA (7th ed.) Citation

Yoon, S. F. Microlithographic Techniques in IC Fabrication. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Yoon, Soon Fatt. Microlithographic Techniques in IC Fabrication. SPIE Digital Library.

MLA (9th ed.) Citation

Yoon, Soon Fatt. Microlithographic Techniques in IC Fabrication. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.